thermal mass flow controller

0-10 sccm) as well as higher full-scale flow ranges up to 1000 slpm. Asia-Pacific: +86-21-58798522, Dutch | Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven SLA5800 family of meters and controllers… for up to 5 psi/sec upstream press. In essence, counting and controlling every gas molecule flowing through the instrument to achieve unmatched precision.

North America: 1-831-373-0200 2-35%, <5% S.P.

The Vögtlin product line-up covers thermal mass flow meters and mass flow controllers for gases and the first long-life integrated battery mass flow meter with built-in touch display.

Use the gas flow chart below to find the right Sierra flow mass controller for your requirements. spike, 407 West Vine StreetHatfield, PA19440-0903 USA. Thermal mass flow controllers and thermal mass flow meters are used to measure and control the flows of gases. Precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control … We use cookies to store information on your device to help us customize and improve your interaction with us. A thermal mass flow controller is designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time. This site uses cookies to improve your browsing experience.

Chinese, Questions? A: Thermal mass flow technology is an industry standard for mass flow control of gases because it measures flow directly, at the molecular level.

), For corrosive and aggressive dry and clean gases, 10 pre-programmed gases, customer selectable, Operating pressure 35 barg, optional up to 345 barg, Measuring ranges from 4 mln/min up to 1000 ln/min, Options: Multigas (up to 10 gases), Profibus, Pressure controller with flow measurement/limitation, Flow controller with pressure measurement, Options: Multigas, Profibus, built-in display. By continuing to use our site, you agree to our use of cookies.

PRECISION GAS FLOW METERS & GAS FLOW CONTROLLERS, Can't you find a personal contact nearby?

We use cookies to improve your browsing experience. In essence, counting and controlling every gas molecule … For further information, please see our Privacy Policy. Sierra’s precision instruments are ideal for very low flows (i.e. Unaffected by upstream gas temperature and pressure fluctuations, gas mass flow control is direct and unequivocal. Please contact our, AA battery powered device with touch display, Measuring ranges from 25 mln/min up to 450 ln/min (27 SCCM – 480 SLPM), Options: Multigas (up to 10 gases), Profibus, built-in display, Wide range of accessories (cables, power supply, etc. Brooks Instrument meets those needs with our game-changing metal sealed thermal mass flow controllers and meters. In detecting the mass flow … German |

Ultra-high purity products for the semiconductor industry, Large installed base with proven long term performance, 316L VAR, 316L, and high alloy Highest-purity flow path. Product Quick Find

2-20%, High Flow GF Series: ±1% S.P. Accurately controlling the gas flow in your application—whether it’s a gas mixture, toxic gas or corrosive—starts with selecting the right MFC.

Talk to an Engineer Toll-Free at 1-800-866-0200 (USA). > 20-100%; ±0.2% F.S. ferritic stainless steel, Standard GF Series: ±1% S.P. Find a model number or product name, Accessories & Software Cables, Filters, Valves, Secondary Electronics, Software, Semiconductor Products 5 Harris Court, Building L Our high-precision …

The measuring terminology usually includes words like "standard" or "normal" flow…

Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control of expensive ultra-pure gases and liquid precursors.

Europe: +31-72-5071400 Sign-up for our newsletter to be informed of product updates, news and events.

Purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media. Sierra Instruments © Copyright 2020 Sierra Instruments, Inc. All Rights Reserved.

For more information about cookies, please see our privacy policy. > 35-100%; ±0.35% F.S.

(Mailing and Shipping Address) French | Thermal mass flow meters are often used in monitoring or controlling mass-related processes such as chemical reactions that depend on the relative masses of unreacted ingredients. By continuing to use our site, you agree to our use of cookies. Precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. Ultra-precise, contaminant-free control. Monterey, CA 93940, Toll-Free USA: 1-800-866-0200 All rights reserved. A thermal mass flow controller is designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time.

All flow controllers will measure and control accurately down to 2% of full scale flow rate. Metal Sealed Thermal Mass Flow Controllers & Meters, Silicon semiconductor device fabrication processes – Etch, Strip, CVD, ALD, PVD, Epi, Diffusion, Implant and RTP, Compound semiconductor device fabrication processes – MOCVD. High-accuracy digital gas blending and dilution systems offer an accurate and easy solution for multiple gas mixing.

Brooks Instrument meets those needs with our game-changing metal sealed thermal mass flow controllers and meters.

An MFC for gas automatically controls the flow rate at a given set point.

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